Micro/Nano Fabrication Facility (NUFAB)

NUFAB is an advanced micro/nano fabrication research facility at Northwestern University. It provides resources for research in MEMs/NEMs, nano-bio, nano/microelectronics, and other related and interdisciplinary areas to Northwestern University community and outside researchers. NUFAB currently resides in EG20-NG32 Technological Institute and has all new research equipment. Please check the equipment list at http://nufab.northwestern.edu/equipment. In July 2013, it will relocate to a new clean room facility. Many more new research tools will be added at that time.